SFS Module 1000sccm EvalKit

Thermal mass flow module with linearized digital / analog output

Fast and compact flow module, suitable for gas dosing systems, manifolds and analysers; Practical Evaluation Kit with fluidic block adapter for direct tube atachment, M5-4 connectors for 4mm tubing included (exchangable)

Product Name
SFS01-M-01000
Operating flow range
+/-1000sccm (ml/min)
Measured medium
Gas Flow
Operating temperature range
0 to 80 °C
Housing material
Aluminium, FR4
Fluidic connection
M5-4mm tube adapter or Ø 2.2 mm i.D. flat gasket (w/o fluidic block)
Flow channel inner dimensions
2.2 mm
Wetted materials
Aluminum, gold, FR4, silicon, silicon nitride, epoxy, nitrile, brass
Connection type
PCB connector JST SM08B-SRSS-TB
Response time t63
20 ms
Output signal
I2C or 0 to 1 V
Accuracy
2% f.s. (digital output)
Repeatability
0.2 % f.s.
156602

Product details